Laser micro‐processing target area with Pharos laser

The laser station uses Pharos laser and is equipped with:

Galvoscanner system (Scanlab SCANcube III):

• Operation with 1030 or 515 nm;
• Scanning speed: ≤ 2 m/s;
• Positioning precision: ~1 μm;
• 10×10 cm processing area.

Microprocessing system:

• Operation with 1030 or 515 nm;
• xyz-stage scanning;
• Scanning speed: ≤ 0.2 m/s;
• Minimum step: 150 nm;
• 10×10 cm processing area.