- Max. repetition rate: 100 kHz
- Pulse length: 0.3 – 2 ps
- Wavelength: 1030 nm + 515 nm + 257.5 nm + 206 nm
- Max energy: 5 mJ, 1 mJ, 0.1 mJ, 0.01 mJ for respective wavelengths
- Beam diameter: approx. 4 mm (it can be modified)
- Polarization: linear
- Availability: 8 hours/day
- Long‐term power stability: <1.2 % RMS over 6 hours
- Beam quality: M2 = 1.4